About
The mission of the UA Micro-Fabrication Facility is to enable and facilitate collaborative, multi-investigator research involving microfabrication of thin films and devices.
The MFF in the North Engineering Research Center (NERC) is housed in a 7111 sq. ft. facility, consisting of three Class 100/1000 cleanroom bays and support areas. The cleanroom bays are for photolithography (Class 100), deposition (Class 1000) and etch (Class 1000), respectively. Equipment available for shared use in the cleanroom include the following:
- Karl Suss MA-6 mask aligner
- Solitec Spinner
- SFI Shamrock Sputtering System
- Denton E-Beam Evaporation System
- STS PECVD System
- Ion Mills (Intelvac and Four-Wave)
- STS Advanced Silicon Etcher
- STS Advanced Oxide Etcher
- Plasmatherm Dual-Chamber Reactive ion Etch System
Publications & Formal Acknowledgement
We request that all publications reporting research conducted in the Micro-Fabrication Facility acknowledge collaboration, i.e., “This work utilized resources owned and maintained by the Micro-Fabrication Facility, which is supported by The University of Alabama.”
